Metrology, Inspection, and Process Control for Microlithography XXVI
You're Invited!
Please be our guest...
2012 SPIE Advanced Lithography is playing host to industry-veteran David Lam.
E-Beam Inspection (EBI) is indispensable, but today's single-column EBI systems will not meet future inspection demands. Multibeam presents its multi-column technology will increase the speed and efficiency of wafer inspection.
Multibeam has built several generations of high-resolution all-electrostaticcolumns. The elimination of magnetic coils and magnetic hysteresis enables the columns to be small, fast, and arrayable. An array of 100 columns covers the entire surface of a 300mm wafer, affording simultaneous cross-wafer sampling. Column design, performance simulations, system architecture, and throughput estimates will be presented. Also provided are examples to illustrate the benefits of multiple-column inspection.
[Paper No. 8324-122]
Sincerely,

Lynn Barringer
President
David Lam is probably best known for Lam
Research (NASDAQ: LRCX), which he founded in
1980. Under his guidance as CEO, the company
introduced the industry's first fully
automated plasma etching system for
semiconductor manufacturing. Lam Research
has since become a global leader in
semiconductor capital equipment. Lam uses
his experience and expertise to provide
guidance to emerging technology
enterprises. Lam received his Ph.D. in
engineering from M.I.T.

Dr.
David K. Lam
Founder of Lam Research, and
currently
Chairman
of Multibeam Corporation and the
David Lam Group
About Multibeam Corporation
Headquartered in
Santa Clara, California, Multibeam
Corporation is a leading developer
of multi-column e-beam technologies
that add high value to semiconductor
lithography by doing away with
costly masks. The company's
Complementary E-Beam Lithography (CEBL)
system augments optical lithography
at critical layers by eliminating
expensive optical multiple
patterning at 20nm processing nodes
and beyond. Multibeam's systems can
also be cost-efficiently leveraged
as primary lithographic tools for
low-volume production of ASICs as
well as in multi-project wafer
programs. Multibeam's
patent-protected e-beam technologies
encompass deployment of multi-column
arrays to perform wafer inspection. For more information, visit
www.multibeamcorp.com.
Media Contact: Tom Rigoli,
Vice President, Multibeam
Corporation,
trigoli@multibeamcorp.com
Tel: 415-385-9675

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