2012 SPIE
Multibeam presents

Tuesday February 14, 2012

San Jose Convention Center Ballroom J2 - 9:40AM

Metrology, Inspection, and Process Control for Microlithography XXVI

You're Invited!

 Please be our guest...

2012 SPIE Advanced Lithography is playing host to industry-veteran David Lam.

E-Beam Inspection (EBI) is indispensable, but today's single-column EBI systems will not meet future inspection demands.  Multibeam presents its multi-column technology will increase the speed and efficiency of wafer inspection.

Multibeam has built several generations of high-resolution all-electrostaticcolumns. The elimination of magnetic coils and magnetic hysteresis enables the columns to be small, fast, and arrayable. An array of 100 columns covers the entire surface of a 300mm wafer, affording simultaneous cross-wafer sampling. Column design, performance simulations, system architecture, and throughput estimates will be presented. Also provided are examples to illustrate the benefits of multiple-column inspection.    

[Paper No. 8324-122]

Sincerely,

Lynn Barringer

President
 

About David Lam

David Lam is probably best known for Lam Research (NASDAQ: LRCX), which he founded in 1980. Under his guidance as CEO, the company introduced the industry's first fully automated plasma etching system for semiconductor manufacturing. Lam Research has since become a global leader in semiconductor capital equipment.  Lam uses his experience and expertise to provide guidance to emerging technology enterprises.  Lam received his Ph.D. in engineering from M.I.T.

Dr. David K. Lam

About Multibeam Corporation

Multibeam is the technology leader in high-speed multiple-column E-Beam Lithography (EBL). In 2011, Multibeam introduced Complementary EBL (CEBL). CEBL extends Optical Lithography and enables the production of leading-edge semiconductors in high volumes at reduced cost. Multibeam is led by Dr. David K. Lam.   

Please visit Multibeam Corporation:  

 www.multibeamcorp.com

For additional information about Multibeam's technology capabilities, or if you would like to submit a request for proposal, please contact:

Lynn Barringer
President

 Tel:  (408) 980-1800 Ext. 8

 email:  barringerl@multibeamcorp.com