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Headquartered in Santa Clara, CA, Multibeam Corporation is
headed by David Lam, CEO, and N. William Parker, CTO.
As the leader in
multi-column e-beam technology, Multibeam holds a
substantial IP portfolio. Multibeam’s e-beam column, the
MBXÔ
Engine, is capable of extraordinary writing speeds,
making it a viable solution to the lithography
challenges facing the semiconductor industry at the 22nm
node.
Multibeam is developing complete multi-column e-beam
lithography systems, the MEBICÔ
line, for low-volume production of ASICs. In addition
to the MEBICÔ,
the company develops custom e-beam columns for OEMs.
Multibeam Team
Multibeam has assembled a world-class engineering team
to develop our electron beam system. Multibeam's
management team has a track record of success in leading
the development and production of semiconductor
manufacturing equipment.
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David Lam -
CEO
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N. William Parker -
CTO
Find out more about
our executives.
E-Beam History
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1935: First
Scanning Electron Microscope (SEM) image
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1970s to 1980s: E-beam
Direct Write (EBDW) produced ICs for use in
mainframe computers.
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1980s to today: E-beam
mask writers are used to pattern photomasks.
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1999: Scalpel
(ASML, Applied Materials, Lucent)
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2001 to today: Multibeam
develops and refines multi-column e-beam technology
and systems.
Multibeam Milestones
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2004-2006: NIST
sponsored EBDW project at Multibeam
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2007-2009: Multibeam
develops high volume e-beam column with OEM
customer.
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Apr 2008: David
Lam becomes CEO
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Jan 2009: Multibeam
moves to new headquarters
Technology
Multibeam e-beam columns are all-electrostatic, enabling
small column footprint and fast slew rates. Each column
includes a TFE electron source and incorporates unique
beam-shaping technologies to achieve high current
density at the wafer. Columns are independently
controlled and functioning, each acting as an individual
e-beam lithography system.
By combining multiple e-beam columns into an array, our
MBXÔ
Engines are capable of achieving speeds that are orders
of magnitude higher than single beam systems. |
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