00c02
 
 

   

TEL to Enter Maskless Litho Business  
  EE Times  

SEMICON West 2009  
  Moscone Center San Francisco
Jul 14-16, 2009
 

SPIE Photomask / BACUS  
  Monterey California
Sep 14-18, 2009
 
     

   

Technical Papers  
     
 
     
   
   
 
Multibeam Corporation is financed by venture capital and supported by NIST and SEMATECH. The company has developed innovative multi-column e-beam technology for lithography and other applications, designing the MBXÔ Engine and the MEBICÔ. Multibeam Corporation is headed by David Lam, best known for founding Lam Research Corporation.

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