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EIPBN
(3-Beam Conference)
Waikoloa,
Hawaii
May 29-June
01, 2012
Multibeam Corporation will present along with Tela
Innovations...
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SEMICON West
San Francisco, California
July
12-14, 2011
Dr. David K. Lam presented...
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SPIE Advanced Lithography
San Jose, California
February 27-Mar 4, 2011
Dr. David K. Lam presented...
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SEMICON Japan
Chiba, Japan
December 1-3, 2010
Dr. David K. Lam presented...
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International Symposium on Lithography Extensions
Kobe, Japan
October 20-22, 2010
Multibeam
Corporation presented...
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Downloads |
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Multibeam EBDW as Complementary Litho - 2010 |
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Optimization of E-beam Landing Energy for EBDW -
2011 |
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Enden D. Liu, and Ted Prescop, “Optimization of
E-beam Landing Energy for EBDW,” Alternative
Lithography Technologies III, Proc. SPIE 7970,
79701S (2011).
Copyright 2011 Society of Photo-Optical
Instrumentation Engineers. One print or electronic
copy may be made for personal use only. Systematic
electronic or print reproduction and distribution,
duplication of any material in this paper for a fee
or for commercial purposes, or modification of the
content of the paper are prohibited. |
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E-Beam to Complement Optical Lithography for 1D
Layouts - 2011 |
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David K. Lam, Enden D. Liu, Michael C. Smayling, and
Ted Prescop, “E-beam to Complement Optical
Lithography for 1D layouts,” Alternative Lithography
Technologies III, Proc. SPIE 7970, 797011 (2011).
Copyright 2011 Society of Photo-Optical
Instrumentation Engineers. One print or electronic
copy may be made for personal use only. Systematic
electronic or print reproduction and distribution,
duplication of any material in this paper for a fee
or for commercial purposes, or modification of the
content of the paper are prohibited.
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