Headlines  
June 2014
From The Whiteboard: David Lam
"A look at what’s missing in semiconductor lithography and what’s needed to finish the job."
Semiconductor Engineering
 
January 2014
Waiting for Next-Generation Lithography...
 
October 2013
Getting Direct on Litho
One-on-one with David Lam
 
July 2013
Slideshow: Lam Eyes Next $1B Opportunity
 
SPIE Photomask Technology
September 09
, 2013
Charting CEBL’s Role in Mainstream Semiconductor Lithography
Dr. David K. Lam
 
     
 
 
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Multibeam News

June 2014
From The Whiteboard: David Lam

A look at what’s missing in semiconductor lithography and what’s needed to finish the job.
Semiconductor Engineering
Watch video...

 

January 2014
Waiting For Next-Generation Lithography

The semiconductor industry has several possible replacements for 193nm immersion, but timing and commercial viability are still in question.
Read more...

 

October 2013
Getting Direct on Litho

One-on-one with David Lam about next-generation lithography, where he's placing his bets, and what's changing in the VCl world.
Read more...

 

July 2013
Slideshow: Lam Eyes Next $1B Opportunity

SANTA CLARA, Calif. -- At 70, David K. Lam is as excited as ever about the future of the semiconductor industry and what he says is his billion-dollar opportunity to nudge it forward for the second time.
EE Times
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April  2013
Dr. David K. Lam featured in "Experiencing Silicon Vally" memoir by Tom Rigoli

TAP Times - Volume 4, Number 4 - April 2013 - Page 40

 

March 2013
Another Key Patent Issued to Multibeam

Multibeam Corporation announces the addition of another key patent to its IP portfolio. The U.S. Patent and Trademark Office has granted US Patent # 8,384,048 B2 to Multibeam Corporation.
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February 2013
David K. Lam Honored at Engineer’s Week Banquet
Dr. David K. Lam and three other eminent technologists were honored last night at the Engineer’s Week Banquet by being inducted into the Silicon Valley Engineering Hall of Fame.
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January 2013
2013 SPIE Advanced Lithography is Playing Host to Industry-veteran David Lam

Multibeam Corporation today confirmed that it will participate in SPIE Advanced Lithography 2013 in San Jose, CA, the world renowned symposium on semiconductor lithography and inspection/metrology.
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November 2012
Technology Entrepreneur David K. Lam Named to Silicon Valley Engineering Hall of Fame

Dr. David K. Lam, widely known as the founder of Lam Research Corporation in 1980, and currently chairman of both Multibeam Corporation and the David Lam Group, has been selected for induction into the distinguished Silicon Valley Engineering Hall of Fame.
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October 2012
Multibeam Corporation Announced the Addition of Another Key Patent to its Portfolio
The U.S. Patent and Trademark Office has granted US Patent # 8,242,457 B2 to Multibeam Corporation. This invention relates to the field of charged particle optics, and in particular to systems for generating high current density shaped electron beam.
Read more...
 
July 2012
Lithography Landscape: E-Beam Lithography Revisited. By Dr. David K. Lam, Multibeam Corporation

We think you'll enjoy this article published by Future Fab International, written by David Lam.
Read more...
 
February 2012
Dr. David K. Lam Talks at 2012 SPIE Advanced Lithography

Tuesday February 14, 2012
San Jose Convention Center

Ballroom J2 - 9:40AM
2012 SPIE Advanced Lithography is playing host to industry-veteran David Lam.
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February 2012
Dr. David K. Lam will present at SPIE Advanced Lithography 2012

12 - 16 February 2012
San Jose Convention Center and San Jose Marriott
San Jose, California, USA
At SPIE Advanced Lithography 2012, Dr. David K. Lam will present Multiple column high-throughput e-beam inspection.

Read more...
 
January 2012
Multibeam Corporation is a Winner of the Red Herring's 2011 Top 100 Global Award

Santa Clara, California - January 3, 2012 - multibeam Corporation announced that it has been selected as a Winner of the Red Herring's 2011 Top 100 Global award, a prestigious recognition honoring the year's most audacious and far reaching private technology companies and entrepreneurs from across the globe.

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December 2011
Multibeam Corporation Selected as a Finalist for Red Herring Global Award

December 5, 2011 - Multibeam Corporation announced that it has been selected as a candidate for Red Herring's 2011 Top 100 Global award, a prestigious recognition honoring the year's most audacious and far reaching private technology companies and entrepreneurs from across the globe.
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September 2011
E-beam Lithography Precision at Optical Lithography Speed: Complementary Lithography Breaks the NGL Logjam
September 6, 2011 - What is semiconductor lithography’s current state? Cost is rising, debate is raging, and a solution is wanting.

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July 2011
Solid State Technology Published Today the Column Article Written by David Lam

The column summarizes Lam's invited talk on Extending Optical Lithography with CEBL (Complementary E-Beam Lithography), scheduled for Wednesday, July 13, at noon, at the Advanced Lithography TechXPOT.
Read more...

 

June 2011
Multibeam Corporation Selected as a Red Herring Top 100 North America Tech Startup

Red Herring announced that it has selected Multibeam Corporation as a Winner of the Top 100 North America award, a prestigious list honoring the year's most promising private technology ventures from the North American business region.
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May 2011
SEM Substrates Inspection with Multiple Electron Beam Technology
Santa Clara, CA - Multibeam Corporation announced the addition of another key patent to its portfolio. The U.S. Patent and Trademark Office granted US Patent # 7,941,237 to Multibeam Corporation on May 10, 2011. The patent covers a method to inspect substrates with multiple e-beam columns.
Read more...

 

April 2011
Another Key Patent Granted to Multibeam Corporation

Santa Clara, CA – The U.S. Patent and Trademark Office granted Multibeam Corporation another key patent. US Patent #7,928,404 was issued to Multibeam on April 19, 2011. The patent covers a method to blank and unblank an electron beam with high speed and low blur, enabling faster and more precise Electron-Beam Lithography (EBL).
Read more...

 
April 2011
Multibeam Corporation's Technical Papers in the 2011 Proceedings of the Advanced Lithography Symposium
SPIE
Santa Clara, CA – SPIE published two technical papers by Multibeam Corporation in the 2011 Proceedings of the Advanced Lithography Symposium. These papers follow a series of presentations on E-Beam Lithography (EBL) in the United States and Japan, by Multibeam.

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March 2011
New details on Complementary Electron-Beam Lithography (CEBL)
Solid State Technology
Santa Clara, CA – Solid State Technology (SST) is revealing new details on Complementary Electron-Beam Lithography (CEBL). CEBL was introduced by Multibeam Corporation at the SPIE Advanced Lithography Symposium earlier this month.

Read more...
 

March 2011
Complementary Electron-beam Lithography Extends Optical Litho Life
Solid State Technology

At SPIE Advanced Lithography (2/27-3/3/11, San Jose, CA), David Lam, chairman of Multibeam Corp., and the founder and former CEO of Lam Research, presented the concept of complementary e-beam lithography (CEBL).
Read more...

 

March 2011
A Glimpse into Intel’s Litho Future
Solid State Technology

March 7, 2011 - If anything in the litho world is certain, it's that 193nm ArF immersion lithography (193i) is being extended...
Read more...

 
February 2011
EE Times Interview with David K. Lam
EE Times
Santa Clara, CA – EE Times published today an interview with David K. Lam, Chairman of Multibeam Corporation.
The article introduces Multibeam’s Complementary Electron-Beam Lithography (CEBL), which enables cost-effective production of microchips at upcoming technology generations.
Read more...
 

February 2011
Startup Rolls Complementary Litho
EE Times

SAN JOSE, Calif. – At the SPIE Advanced Lithography conference here, maskless startup Multibeam Corporation will outline more details about its ongoing efforts to commercialize its so-called Complementary E-Beam Lithography (CEBL) technology in the market.
Read more...

 

Trade Publications

Future Fab, Leading Information Resource for Chip Fabrication Industry, Publishes First Digital Edition Online.

For thirty years, EE Times has been the electronics industry newspaper.

solid state technology
 
Semiconductor Magazine covers semiconductor manufacturing, industry news, semiconductor equipment, and more.

Industry Organizations

semi
 
Multibeam is a SEMI member.  SEMI is the global industry association serving the manufacturing supply chains for the microelectronic, display, and photovoltaic industries.

spie
 
SPIE is an international society advancing an interdisciplinary approach to the science and application of light.

sematech
SEMATECH (SEmiconductor MAnufacturing TECHnology) is a non-profit consortium that performs basic research into semiconductor manufacturing.

   
       
     
       
 
 
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