Multibeam News

TEL to Enter Maskless Litho Business -
EE Times (Feb 2009)
SAN JOSE, Calif. -- Japanese equipment giant Tokyo Electron Ltd. (TEL) is quietly making an entry into the maskless lithography business.
In recent times, TEL (Tokyo) entered into an agreement with Multibeam Systems Inc. (Santa Clara, Calif.), a developer of multi-beam maskless lithography technology, sources said.
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Startup Multibeam Enters Maskless Lithography Race -
EE Times (Jan 2005)
SAN JOSE, Calif. — Taking a new approach to a growing problem, startup Multibeam Systems Inc. this week is expected to become the latest company to enter the emerging maskless lithography market.
"At the so-called Maskless Meeting event here — which is sponsored by International Sematech — Multibeam on Tuesday (Jan. 18) is expected to debut a multi-electron-beam technology, based on what it calls electrostatic scalable optics."
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SEMI is the global industry association serving the manufacturing supply chains for the microelectronic, display, and photovoltaic industries.

SPIE is an international society advancing an interdisciplinary approach to the science and application of light.

For thirty years, EE Times has been the electronics industry newspaper.

Solid State Technology is a resource for engineers and managers in the worldwide semiconductor manufacturing industry, including breaking news.

Semiconductor Magazine covers semiconductor manufacturing, industry news, semiconductor equipment, and more.

SEMATECH (SEmiconductor MAnufacturing TECHnology) is a non-profit consortium that performs basic research into semiconductor manufacturing.

Global Semiconductor Alliance (GSA) is the voice of the global fabless semiconductor business model.

SIA represents the US computer chip manufacturing industry on issues of trade, technology, environmental protection, and worker safety and health.

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